9/1/2010	9:56:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/1/2010	9:56:46 AM	Recipe started at 9:56 AM
9/1/2010	9:56:46 AM	H2 valve closed
9/1/2010	9:56:46 AM	BCl3 valve closed
9/1/2010	9:56:46 AM	PH3 valve closed
9/1/2010	9:56:46 AM	SiCl4 pre valve closed
9/1/2010	9:56:46 AM	SiCl4 post valve closed
9/1/2010	9:56:46 AM	Main Vac valve closed
9/1/2010	9:56:46 AM	Bypass valve closed
9/1/2010	9:56:46 AM	Bubbler valve closed
9/1/2010	9:56:46 AM	Helium valve opened
9/1/2010	9:56:46 AM	Helium MFC set to  500.000000
9/1/2010	9:56:46 AM	H2 MFC set to  0.000000
9/1/2010	9:56:46 AM	BCl3 MFC set to  0.000000
9/1/2010	9:56:46 AM	PHl3 MFC set to  0.000000
9/1/2010	9:56:46 AM	SiCl4 MFC set to  0.000000
9/1/2010	9:56:46 AM	Bypass solenoid MFC set to  0.000000
9/1/2010	9:56:46 AM	Tube furnace set to 0
9/1/2010	9:58:06 AM	Helium valve closed
9/1/2010	9:58:06 AM	H2 valve closed
9/1/2010	9:58:06 AM	BCl3 valve closed
9/1/2010	9:58:06 AM	PH3 valve closed
9/1/2010	9:58:06 AM	SiCl4 pre valve closed
9/1/2010	9:58:06 AM	SiCl4 post valve closed
9/1/2010	9:58:06 AM	Main Vac valve closed
9/1/2010	9:58:06 AM	Bypass valve closed
9/1/2010	9:58:06 AM	Bubbler valve closed
9/1/2010	9:58:06 AM	Helium MFC set to  0.000000
9/1/2010	9:58:06 AM	H2 MFC set to  0.000000
9/1/2010	9:58:06 AM	BCl3 MFC set to  0.000000
9/1/2010	9:58:06 AM	PHl3 MFC set to  0.000000
9/1/2010	9:58:06 AM	SiCl4 MFC set to  0.000000
9/1/2010	9:58:06 AM	Bypass solenoid MFC set to  0.000000
9/1/2010	9:58:06 AM	Tube furnace set to 0
9/1/2010	9:58:07 AM	Run finished at 9:58 AM
9/1/2010	9:58:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/1/2010	10:02:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/1/2010	10:02:58 AM	Recipe started at 10:02 AM
9/1/2010	10:02:58 AM	Helium valve closed
9/1/2010	10:02:58 AM	H2 valve closed
9/1/2010	10:02:58 AM	BCl3 valve closed
9/1/2010	10:02:58 AM	PH3 valve closed
9/1/2010	10:02:58 AM	SiCl4 pre valve closed
9/1/2010	10:02:58 AM	SiCl4 post valve closed
9/1/2010	10:02:58 AM	Main Vac valve closed
9/1/2010	10:02:58 AM	Bubbler valve closed
9/1/2010	10:02:58 AM	Bypass valve opened
9/1/2010	10:02:58 AM	Helium MFC set to  0.000000
9/1/2010	10:02:58 AM	H2 MFC set to  0.000000
9/1/2010	10:02:58 AM	BCl3 MFC set to  0.000000
9/1/2010	10:02:58 AM	PHl3 MFC set to  0.000000
9/1/2010	10:02:58 AM	SiCl4 MFC set to  0.000000
9/1/2010	10:02:58 AM	Bypass solenoid MFC set to  0.000000
9/1/2010	10:02:58 AM	Tube furnace set to 0
9/1/2010	10:03:37 AM	Helium valve closed
9/1/2010	10:03:37 AM	H2 valve closed
9/1/2010	10:03:37 AM	BCl3 valve closed
9/1/2010	10:03:37 AM	PH3 valve closed
9/1/2010	10:03:37 AM	SiCl4 pre valve closed
9/1/2010	10:03:37 AM	SiCl4 post valve closed
9/1/2010	10:03:37 AM	Bubbler valve closed
9/1/2010	10:03:37 AM	Main Vac valve opened
9/1/2010	10:03:37 AM	Bypass valve opened
9/1/2010	10:03:37 AM	Helium MFC set to  0.000000
9/1/2010	10:03:37 AM	H2 MFC set to  0.000000
9/1/2010	10:03:37 AM	BCl3 MFC set to  0.000000
9/1/2010	10:03:37 AM	PHl3 MFC set to  0.000000
9/1/2010	10:03:37 AM	SiCl4 MFC set to  0.000000
9/1/2010	10:03:37 AM	Bypass solenoid MFC set to  0.000000
9/1/2010	10:03:37 AM	Tube furnace set to 0
9/1/2010	10:03:38 AM	Run finished at 10:03 AM
9/1/2010	10:03:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/1/2010	10:08:50 AM	Recipe started at 10:08 AM
9/1/2010	10:08:50 AM	Helium valve closed
9/1/2010	10:08:50 AM	BCl3 valve closed
9/1/2010	10:08:50 AM	PH3 valve closed
9/1/2010	10:08:50 AM	SiCl4 pre valve closed
9/1/2010	10:08:50 AM	SiCl4 post valve closed
9/1/2010	10:08:50 AM	Main Vac valve closed
9/1/2010	10:08:50 AM	Bypass valve closed
9/1/2010	10:08:50 AM	Bubbler valve closed
9/1/2010	10:08:50 AM	H2 valve opened
9/1/2010	10:08:50 AM	Helium MFC set to  0.000000
9/1/2010	10:08:50 AM	H2 MFC set to  500.000000
9/1/2010	10:08:50 AM	BCl3 MFC set to  0.000000
9/1/2010	10:08:50 AM	PHl3 MFC set to  0.000000
9/1/2010	10:08:50 AM	SiCl4 MFC set to  0.000000
9/1/2010	10:08:50 AM	Bypass solenoid MFC set to  0.000000
9/1/2010	10:08:50 AM	Tube furnace set to 0
9/1/2010	10:10:13 AM	Helium valve closed
9/1/2010	10:10:13 AM	BCl3 valve closed
9/1/2010	10:10:13 AM	PH3 valve closed
9/1/2010	10:10:13 AM	SiCl4 pre valve closed
9/1/2010	10:10:13 AM	SiCl4 post valve closed
9/1/2010	10:10:13 AM	Main Vac valve closed
9/1/2010	10:10:13 AM	Bypass valve closed
9/1/2010	10:10:13 AM	Bubbler valve closed
9/1/2010	10:10:13 AM	H2 valve opened
9/1/2010	10:10:13 AM	Helium MFC set to  0.000000
9/1/2010	10:10:13 AM	H2 MFC set to  500.000000
9/1/2010	10:10:13 AM	BCl3 MFC set to  0.000000
9/1/2010	10:10:13 AM	PHl3 MFC set to  0.000000
9/1/2010	10:10:13 AM	SiCl4 MFC set to  0.000000
9/1/2010	10:10:13 AM	Bypass solenoid MFC set to  0.000000
9/1/2010	10:10:13 AM	Tube furnace set to 0
9/1/2010	10:10:15 AM	Run aborted at 10:10 AM
9/1/2010	10:10:15 AM	Helium valve closed
9/1/2010	10:10:15 AM	H2 valve closed
9/1/2010	10:10:15 AM	BCl3 valve closed
9/1/2010	10:10:15 AM	PH3 valve closed
9/1/2010	10:10:15 AM	SiCl4 pre valve closed
9/1/2010	10:10:15 AM	SiCl4 post valve closed
9/1/2010	10:10:15 AM	Bypass valve closed
9/1/2010	10:10:15 AM	Main Vac valve closed
9/1/2010	10:10:15 AM	Bubbler valve closed
9/1/2010	10:10:15 AM	Helium MFC set to  0.000000
9/1/2010	10:10:15 AM	H2 MFC set to  0.000000
9/1/2010	10:10:15 AM	BCl3 MFC set to  0.000000
9/1/2010	10:10:15 AM	PHl3 MFC set to  0.000000
9/1/2010	10:10:15 AM	SiCl4 MFC set to  0.000000
9/1/2010	10:10:16 AM	Tube furnace set to 0
9/1/2010	10:10:45 AM	Recipe started at 10:10 AM
9/1/2010	10:10:45 AM	Helium valve closed
9/1/2010	10:10:45 AM	BCl3 valve closed
9/1/2010	10:10:45 AM	PH3 valve closed
9/1/2010	10:10:45 AM	SiCl4 pre valve closed
9/1/2010	10:10:45 AM	SiCl4 post valve closed
9/1/2010	10:10:45 AM	Main Vac valve closed
9/1/2010	10:10:45 AM	Bypass valve closed
9/1/2010	10:10:45 AM	Bubbler valve closed
9/1/2010	10:10:45 AM	H2 valve opened
9/1/2010	10:10:45 AM	Helium MFC set to  0.000000
9/1/2010	10:10:45 AM	H2 MFC set to  500.000000
9/1/2010	10:10:45 AM	BCl3 MFC set to  0.000000
9/1/2010	10:10:45 AM	PHl3 MFC set to  0.000000
9/1/2010	10:10:45 AM	SiCl4 MFC set to  0.000000
9/1/2010	10:10:45 AM	Bypass solenoid MFC set to  0.000000
9/1/2010	10:10:45 AM	Tube furnace set to 0
9/1/2010	10:10:46 AM	Helium valve closed
9/1/2010	10:10:46 AM	BCl3 valve closed
9/1/2010	10:10:46 AM	PH3 valve closed
9/1/2010	10:10:46 AM	SiCl4 pre valve closed
9/1/2010	10:10:46 AM	SiCl4 post valve closed
9/1/2010	10:10:46 AM	Main Vac valve closed
9/1/2010	10:10:46 AM	Bypass valve closed
9/1/2010	10:10:46 AM	H2 valve opened
9/1/2010	10:10:46 AM	Bubbler valve opened
9/1/2010	10:10:46 AM	Helium MFC set to  0.000000
9/1/2010	10:10:46 AM	H2 MFC set to  500.000000
9/1/2010	10:10:46 AM	BCl3 MFC set to  0.000000
9/1/2010	10:10:46 AM	PHl3 MFC set to  0.000000
9/1/2010	10:10:46 AM	SiCl4 MFC set to  0.000000
9/1/2010	10:10:46 AM	Bypass solenoid MFC set to  0.000000
9/1/2010	10:10:46 AM	Tube furnace set to 0
9/1/2010	10:10:46 AM	Helium valve closed
9/1/2010	10:10:46 AM	H2 valve closed
9/1/2010	10:10:46 AM	BCl3 valve closed
9/1/2010	10:10:46 AM	PH3 valve closed
9/1/2010	10:10:46 AM	SiCl4 pre valve closed
9/1/2010	10:10:46 AM	SiCl4 post valve closed
9/1/2010	10:10:46 AM	Main Vac valve closed
9/1/2010	10:10:46 AM	Bubbler valve closed
9/1/2010	10:10:46 AM	Bypass valve closed
9/1/2010	10:10:46 AM	Helium MFC set to  0.000000
9/1/2010	10:10:46 AM	H2 MFC set to  0.000000
9/1/2010	10:10:46 AM	BCl3 MFC set to  0.000000
9/1/2010	10:10:46 AM	PHl3 MFC set to  0.000000
9/1/2010	10:10:46 AM	SiCl4 MFC set to  0.000000
9/1/2010	10:10:46 AM	Bypass solenoid MFC set to  760.000000
9/1/2010	10:10:46 AM	Tube furnace set to 0
9/1/2010	10:10:46 AM	Baratron reads 740.297493 Torr and NaOH valve is open.  Emergency exit.
9/1/2010	10:10:52 AM	Run aborted at 10:10 AM
9/1/2010	10:11:03 AM	Recipe started at 10:11 AM
9/1/2010	10:11:03 AM	Helium valve closed
9/1/2010	10:11:03 AM	BCl3 valve closed
9/1/2010	10:11:03 AM	PH3 valve closed
9/1/2010	10:11:03 AM	SiCl4 pre valve closed
9/1/2010	10:11:03 AM	SiCl4 post valve closed
9/1/2010	10:11:03 AM	Main Vac valve closed
9/1/2010	10:11:03 AM	Bypass valve closed
9/1/2010	10:11:03 AM	Bubbler valve closed
9/1/2010	10:11:03 AM	H2 valve opened
9/1/2010	10:11:03 AM	Helium MFC set to  0.000000
9/1/2010	10:11:03 AM	H2 MFC set to  500.000000
9/1/2010	10:11:03 AM	BCl3 MFC set to  0.000000
9/1/2010	10:11:03 AM	PHl3 MFC set to  0.000000
9/1/2010	10:11:03 AM	SiCl4 MFC set to  0.000000
9/1/2010	10:11:03 AM	Bypass solenoid MFC set to  0.000000
9/1/2010	10:11:04 AM	Tube furnace set to 0
9/1/2010	10:11:07 AM	Helium valve closed
9/1/2010	10:11:07 AM	BCl3 valve closed
9/1/2010	10:11:07 AM	PH3 valve closed
9/1/2010	10:11:07 AM	SiCl4 pre valve closed
9/1/2010	10:11:07 AM	SiCl4 post valve closed
9/1/2010	10:11:07 AM	Main Vac valve closed
9/1/2010	10:11:07 AM	Bypass valve closed
9/1/2010	10:11:07 AM	H2 valve opened
9/1/2010	10:11:07 AM	Bubbler valve opened
9/1/2010	10:11:07 AM	Helium MFC set to  0.000000
9/1/2010	10:11:07 AM	H2 MFC set to  500.000000
9/1/2010	10:11:07 AM	BCl3 MFC set to  0.000000
9/1/2010	10:11:07 AM	PHl3 MFC set to  0.000000
9/1/2010	10:11:07 AM	SiCl4 MFC set to  0.000000
9/1/2010	10:11:07 AM	Bypass solenoid MFC set to  0.000000
9/1/2010	10:11:07 AM	Tube furnace set to 0
9/1/2010	10:31:07 AM	Helium valve closed
9/1/2010	10:31:07 AM	BCl3 valve closed
9/1/2010	10:31:07 AM	PH3 valve closed
9/1/2010	10:31:07 AM	SiCl4 pre valve closed
9/1/2010	10:31:07 AM	SiCl4 post valve closed
9/1/2010	10:31:07 AM	Main Vac valve closed
9/1/2010	10:31:07 AM	Bypass valve closed
9/1/2010	10:31:07 AM	Bubbler valve closed
9/1/2010	10:31:07 AM	H2 valve opened
9/1/2010	10:31:07 AM	Helium MFC set to  0.000000
9/1/2010	10:31:07 AM	H2 MFC set to  500.000000
9/1/2010	10:31:07 AM	BCl3 MFC set to  0.000000
9/1/2010	10:31:07 AM	PHl3 MFC set to  0.000000
9/1/2010	10:31:07 AM	SiCl4 MFC set to  0.000000
9/1/2010	10:31:07 AM	Bypass solenoid MFC set to  0.000000
9/1/2010	10:31:07 AM	Tube furnace set to 700
9/1/2010	10:31:25 AM	Helium valve closed
9/1/2010	10:31:25 AM	H2 valve closed
9/1/2010	10:31:25 AM	BCl3 valve closed
9/1/2010	10:31:25 AM	PH3 valve closed
9/1/2010	10:31:25 AM	SiCl4 pre valve closed
9/1/2010	10:31:25 AM	SiCl4 post valve closed
9/1/2010	10:31:25 AM	Main Vac valve closed
9/1/2010	10:31:25 AM	Bubbler valve closed
9/1/2010	10:31:25 AM	Bypass valve opened
9/1/2010	10:31:25 AM	Helium MFC set to  0.000000
9/1/2010	10:31:25 AM	H2 MFC set to  0.000000
9/1/2010	10:31:25 AM	BCl3 MFC set to  0.000000
9/1/2010	10:31:25 AM	PHl3 MFC set to  0.000000
9/1/2010	10:31:25 AM	SiCl4 MFC set to  0.000000
9/1/2010	10:31:25 AM	Bypass solenoid MFC set to  760.000000
9/1/2010	10:31:25 AM	Tube furnace set to 0
9/1/2010	10:31:25 AM	Baratron reads 901.588320 Torr.  Emergency exit.
9/1/2010	10:37:02 AM	Run aborted at 10:37 AM
9/1/2010	10:37:12 AM	H2 MFC set to  500.000000
9/1/2010	10:37:13 AM	H2 valve closed
9/1/2010	10:37:14 AM	H2 valve opened
9/1/2010	10:37:35 AM	H2 valve closed
9/1/2010	10:37:41 AM	Bubbler valve closed
9/1/2010	10:37:44 AM	Bypass valve opened
9/1/2010	10:37:45 AM	Bypass valve closed
9/1/2010	10:37:49 AM	H2 valve opened
9/1/2010	10:39:08 AM	Bubbler valve opened
9/1/2010	1:04:23 PM	H2 valve closed
9/1/2010	1:04:26 PM	H2 MFC set to  0.000000
9/1/2010	1:04:33 PM	Bubbler valve closed
9/1/2010	1:07:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/1/2010	1:07:58 PM	Recipe started at 1:07 PM
9/1/2010	1:07:58 PM	Helium valve closed
9/1/2010	1:07:58 PM	H2 valve closed
9/1/2010	1:07:58 PM	BCl3 valve closed
9/1/2010	1:07:58 PM	PH3 valve closed
9/1/2010	1:07:58 PM	SiCl4 pre valve closed
9/1/2010	1:07:58 PM	SiCl4 post valve closed
9/1/2010	1:07:58 PM	Main Vac valve closed
9/1/2010	1:07:58 PM	Bubbler valve closed
9/1/2010	1:07:58 PM	Bypass valve opened
9/1/2010	1:07:58 PM	Helium MFC set to  0.000000
9/1/2010	1:07:58 PM	H2 MFC set to  0.000000
9/1/2010	1:07:58 PM	BCl3 MFC set to  0.000000
9/1/2010	1:07:58 PM	PHl3 MFC set to  0.000000
9/1/2010	1:07:58 PM	SiCl4 MFC set to  0.000000
9/1/2010	1:07:58 PM	Bypass solenoid MFC set to  0.000000
9/1/2010	1:07:59 PM	Tube furnace set to 0
9/1/2010	1:08:32 PM	Helium valve closed
9/1/2010	1:08:32 PM	H2 valve closed
9/1/2010	1:08:32 PM	BCl3 valve closed
9/1/2010	1:08:32 PM	PH3 valve closed
9/1/2010	1:08:32 PM	SiCl4 pre valve closed
9/1/2010	1:08:32 PM	SiCl4 post valve closed
9/1/2010	1:08:32 PM	Bubbler valve closed
9/1/2010	1:08:32 PM	Main Vac valve opened
9/1/2010	1:08:32 PM	Bypass valve opened
9/1/2010	1:08:32 PM	Helium MFC set to  0.000000
9/1/2010	1:08:32 PM	H2 MFC set to  0.000000
9/1/2010	1:08:32 PM	BCl3 MFC set to  0.000000
9/1/2010	1:08:32 PM	PHl3 MFC set to  0.000000
9/1/2010	1:08:32 PM	SiCl4 MFC set to  0.000000
9/1/2010	1:08:32 PM	Bypass solenoid MFC set to  0.000000
9/1/2010	1:08:32 PM	Tube furnace set to 0
9/1/2010	1:08:32 PM	Run finished at 1:08 PM
9/1/2010	1:08:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
